JPS6364768U - - Google Patents
Info
- Publication number
- JPS6364768U JPS6364768U JP15875186U JP15875186U JPS6364768U JP S6364768 U JPS6364768 U JP S6364768U JP 15875186 U JP15875186 U JP 15875186U JP 15875186 U JP15875186 U JP 15875186U JP S6364768 U JPS6364768 U JP S6364768U
- Authority
- JP
- Japan
- Prior art keywords
- crucible
- coil
- vacuum chamber
- directly above
- ion plating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000008020 evaporation Effects 0.000 claims description 2
- 238000001704 evaporation Methods 0.000 claims description 2
- 230000005284 excitation Effects 0.000 claims description 2
- 238000007733 ion plating Methods 0.000 claims 2
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15875186U JPS6364768U (en]) | 1986-10-16 | 1986-10-16 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15875186U JPS6364768U (en]) | 1986-10-16 | 1986-10-16 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6364768U true JPS6364768U (en]) | 1988-04-28 |
Family
ID=31082532
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15875186U Pending JPS6364768U (en]) | 1986-10-16 | 1986-10-16 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6364768U (en]) |
-
1986
- 1986-10-16 JP JP15875186U patent/JPS6364768U/ja active Pending